The chip used efficient CMOS gates, like modern chips. A CMOS gate uses two types of transistors: PMOS transistors pull the output high, while NMOS transistors pull the output low. Each "ƎE" cell has two PMOS transistors at the top and two NMOS transistors at the bottom.
The chip is formed from a silicon die. Regions are doped with impurities to form the transistors. A special type of silicon called polysilicon is put on top to form the transistor gates. Two layers of metal wiring are put on top to connect everything.