@kenshirriff @clark
Ken no doubt has a long list of "old VLSI books" to recommend, but undoubtedly one should start with the extremely accessible (IMHO) classic by Mead and Conway:
Mead–Conway VLSI chip design revolution
https://en.wikipedia.org/wiki/Mead%E2%80%93Conway_VLSI_chip_design_revolution
"Introduction to VLSI Systems" by Carver Mead, Lynn Conway; 1979 (or 1980?)
ISBN-10: 0201043580 ISBN-13: 978-0201043587
https://www.amazon.com/Introduction-VLSI-Systems-Carver-Mead/dp/0201043580
Archive.org borrow-able online copy
https://archive.org/details/introductiontovl00mead
I imagine it's on the other usual online book sources as well.